The POU3500 system gives dynamic temperature Charge of the procedure chamber cathode / electrode / anode and can be synchronized with any etch method.

30% of its peak energy intake, providing click here our shoppers considerable reduction in operating prices and amplified trustworthiness.

Using the POU3500, you'll be able to attain unprecedented leads to etch effectiveness, chamber uptime, minimized expense of ownership and fab space utilization – all while enhancing your course of action trustworthiness.

at first Established in 1985, our business has developed right into a identified chief in supplying temperature Command devices to the worldwide semiconductor industry.

LAUDA-Noah will, for your consumer's retrofit evaluation, watch and regulate its fluid temperature Regulate profiles to match an present TCUs' in order to ensure a clean system integration via DAQ.

we have been guided in our perception that prosperity With this aggressive market stems from giving shoppers with hugely engineered new goods and planet class customer support.

The accuracy of your POU 3500 allows for unbiased Charge of the method fluid temperature to your wafer chuck within +/- 0.1 °C of established position, as well as rapid reaction time with the method allows for max wafer-to-wafer repeatability all over the etch method.

With the POU3300, you may achieve unprecedented results in etch effectiveness, chamber uptime, decreased price of ownership and fab Place utilization – all even though bettering your procedure dependability.

the info pertains to some 300mm chamber temperature profile through a superior element ratio Etch system, operating at pretty high RF electrical power ailments (~3.8kW). The persuasive aspects of this info set are:

LAUDA-Noah is Conference these new problems and has incorporated energy preserving technological know-how in programs which might be friendly on the environment and have a low cost to function.

The TEs' can swap directly from heating to cooling, or visa-versa. they could turn on & off when in the heating or cooling manner and will boost or lessen the amount of heating or cooling without the need of switching in anyway.

a lot more than ever, shrinking device geometries, demanding new procedures plus a remarkably competitive setting demand temperature Manage programs that combine fast and exact temperature Management having an emphasis on lowered working fees and enhanced reliability.

The reality is usually that real Dynamic Temperature Handle can only be obtained when all five (5) of the next technique design and set up needs are satisfied:

seeing totally free motion pictures on the web is a practical and frugal solution to see the movies you love right within the consolation of your own Home.

We realize that great solutions are often the results of wonderful customer comments and the application of innovative engineering. We attempt to generate price for our customers by way of a system that allows The shopper impact our plans, objectives, item developments and business practices.